°³¿ä

»ê¡¤ÇС¤¿¬ Çù·ÂÈ°µ¿ °³¿ä

Á¦3ȸ ALD Academy(ALD Academy 2023) ÇÁ·Î±×·¥(³»¿ë¼Ò°³)

ÁÖÁ¦ ÁÖ¿ä³»¿ë
ALD introduction
¹ßÇ¥ÀÚ : ÀüÇüŹ ±³¼ö
(ÇѾç´ë)

ALD°øÁ¤Àº ÀÌ °øÁ¤ÀÌ ¼Ò°³µÈ ÀÌÈÄ·Î »ê¾÷°è³ª Çа迡¼­ ¸¹Àº ¿¬±¸¿Í ¹ßÀüÀÌ ÀÌ·ç¿öÁ³½À´Ï´Ù. ƯÈ÷ ¹ÝµµÃ¼ ºÐ¾ß¿¡¼­´Â mainstream°øÁ¤À¸·Î ÀÚ¸®Àâ°Ô µÇ¾úÀ¸¸ç ¾ÕÀ¸·Î ¹ÝµµÃ¼ ¹Ú¸· ÁõÂø °øÁ¤¿¡ ALD °³³äÀÌ Àû¿ëµÈ °øÁ¤ÀÌ ¸¹ÀÌ °³¹ßµÉ °ÍÀ¸·Î »ý°¢µË´Ï´Ù. µû¶ó¼­ ÀÌ °­ÀÇÀÇ ÁÖ¿ä ³»¿ëÀº ALDÀÇ ±âÃÊ °³³ä°ú ÀÀ¿ë¿¡ ´ëÇØ ¼Ò°³ÇÏ·Á°í ÇÕ´Ï´Ù. ALD°øÁ¤ÀÇ °¢ cycle´ç precursorÀÇ chemisorption ¹ÝÀÀ, steric hinderance¿Í ´Ü¿øÀÚÃþ ÁõÂø °¡´É¼º, precursor °³¹ß ±×¸®°í thermal°ú plasma ALDÀåºñ¿¡ ´ëÇØ Áö³­ 50³â°£ÀÇ ALD ¹ßÀü¿¡ ´ëÇØ ¿ä¾àÇØ º¸·Á°íÇÕ´Ï´Ù.

ALD Ç¥¸éÈ­ÇÐ ºÐ¾ß:
¹ßÇ¥ÀÚ : ¹Î¿ä¼Á ±³¼ö
(°Ç±¹´ë)

- Introduction to in-situ analytical methods for mechanistic study

- Existence of water-stable methyl group in Al2O3 ALD using TMA and water

- Pyridine-catalyzed ALD of SiO2 from HCDS and water

- MLD of titanicone films from TiCl4 and ethylene glycol

- The origin of instability of MLD-grown titanicone films

ALD µð½ºÇ÷¹ÀÌ ÀÀ¿ë ºÐ¾ß:
¹ßÇ¥ÀÚ : ¹ÚÁø¼º ±³¼ö
(ÇѾç´ë)

µð½ºÇ÷¹ÀÌ ¿ø¸®, ±¸Á¶, µ¿ÀÛ¹æ¹ý

ALD°øÁ¤ÀÇ µð½ºÇ÷¹ÀÌ ÀÀ¿ë

2-1. First Wave : Thin Film Encapsulation,

2-2. Second Wave : Active Matrix Device

2-3. Third Wave : Nano-laminated & Flexible/Stretchable ¼ÒÀç

3. Summary

ALD ¸Þ¸ð¸® ÀÀ¿ë ºÐ¾ß:
¹ßÇ¥ÀÚ : ¾ÈÁöÈÆ ±³¼ö

(ÇѾç´ë)

¹ÝµµÃ¼ ¹Ì¼¼È­¿Í ÁýÀû°øÁ¤ÀÇ paradigm sift·Î ÀÎÇØ DRAM°ú flashµî ±âÁ¸ÀÇ ¸Þ¸ð¸® ¼ÒÀÚ¿Í ´õºÒ¾î »õ·Î¿î °³³äÀÇ ¼ÒÀڵ鿡 ´ëÇÑ ¿¬±¸°¡ È°¹ßÈ÷ ÁøÇàÁßÀ̸ç ÀÌ¿¡ µû¶ó »õ·Î¿î ±â´É¼º ¼ÒÀç °³¹ßÀÌ ÇÊ¿äÇÏ´Ù. º» ¹ßÇ¥¿¡¼­´Â I) ¸Þ¸ð¸® ¼ÒÀÚÀÇ ÀüÇÏÀúÀå È¿À²À» Áõ´ë½ÃÅ°±â À§ÇÑ ¹Ú¸· ¼³°è ¹× ii) Â÷¼¼´ë ¹ÝµµÃ¼ ä³Î ¼ÒÀç·Î °¢±¤¹Þ°í ÀÖ´Â 2Â÷¿ø ¹ÝµµÃ¼ ¼ÒÀçÀÇ ALD ±â¹Ý ´ë¸éÀû ÁõÂø ¿¬±¸ÀÇ µ¿Çâ¿¡ ´ëÇÏ¿© ´Ù·é´Ù.